AMAT 0010-13626 Control Module
- Product Code: 0010-13626
- Availability: In Stock
AMAT 0010-13626 Control Module
Applied Materials Semiconductor Equipment Component
Overview
The AMAT 0010-13626 is a specialized control module designed for use in Applied Materials semiconductor manufacturing equipment. As a critical component in advanced semiconductor fabrication systems, this module provides precise control and monitoring capabilities essential for maintaining optimal process conditions in high-tech manufacturing environments.
Engineered to meet the stringent requirements of semiconductor manufacturing, the 0010-13626 module offers high reliability, precise performance, and seamless integration with Applied Materials' process tools. Its robust design ensures consistent operation in the demanding cleanroom environments of semiconductor fabrication facilities.
Specifications
Electrical Specifications
- Power Supply: 24 VDC ±10%
- Power Consumption: 8W maximum
- Input Voltage Range: 21.6-26.4 VDC
- Isolation: Galvanic isolation between channels
- Fuse Rating: 0.5A slow blow
Input/Output Specifications
- Analog Inputs: 8 channels, 4-20 mA, 0-10 VDC
- Discrete Inputs: 12 channels, 24 VDC
- Relay Outputs: 6 channels, Form C, 2A @ 250 VAC
- Digital Outputs: 8 channels, open collector
- Communication Ports: 1 x Ethernet, 1 x RS-485
Environmental Specifications
- Operating Temperature: 15°C to 35°C
- Storage Temperature: -40°C to +85°C
- Humidity: 30% to 70% non-condensing
- Vibration: 5-500 Hz, 5 g peak
- Cleanroom Compatible: Class 100
Physical Specifications
- Dimensions: 100 x 70 x 150 mm
- Weight: 0.6 kg (approx.)
- Mounting: DIN rail or panel mount
- Enclosure: Anodized aluminum
- Ingress Protection: IP20
Features
High-Precision Control
Provides extremely precise control of process parameters critical in semiconductor manufacturing. Enables nanometer-level precision required for advanced semiconductor fabrication processes.
Cleanroom Compatible Design
Specifically designed for use in semiconductor cleanroom environments. Low particle generation, sealed construction, and materials compatible with strict cleanroom requirements.
Advanced Signal Processing
Incorporates advanced signal processing algorithms for noise reduction and signal conditioning. Ensures reliable operation in the electrically noisy environment of semiconductor manufacturing equipment.
Seamless System Integration
Designed for seamless integration with Applied Materials' semiconductor processing equipment. Compatible with AMAT's control systems and communication protocols for plug-and-play installation.
Redundant Safety Features
Incorporates multiple safety features including overcurrent protection, thermal shutdown, and fault detection. Ensures safe operation of semiconductor manufacturing processes and protects expensive equipment.
Diagnostic Capabilities
Advanced self-diagnostic capabilities for monitoring module health and detecting system faults. Provides detailed diagnostic information for quick troubleshooting and maintenance in critical manufacturing environments.
Applications
Semiconductor Etch Processes
Used in plasma etch systems for controlling critical parameters such as gas flow, pressure, and RF power. Enables precise pattern transfer essential for semiconductor device fabrication.
Chemical Vapor Deposition
Applied in CVD systems for controlling temperature, pressure, and precursor delivery. Ensures uniform and conformal film deposition for semiconductor device layers.
Physical Vapor Deposition
Used in PVD systems for controlling sputtering parameters and target power. Enables precise metal layer deposition for interconnects and electrodes in semiconductor devices.
Chemical Mechanical Planarization
Applied in CMP systems for controlling polishing parameters such as pressure, velocity, and slurry flow. Ensures precise planarization of semiconductor device layers.
Ion Implantation
Used in ion implantation systems for controlling beam current, energy, and scanning parameters. Enables precise dopant introduction for semiconductor device fabrication.
Photolithography
Applied in photolithography equipment for controlling exposure parameters and alignment systems. Ensures precise pattern definition critical for semiconductor device fabrication.
Technical Details
Communication Protocols
- Ethernet: Modbus TCP/IP, AMAT Proprietary
- Serial: Modbus RTU, RS-485
- Fieldbus: Profibus DP (optional)
- OPC UA: For secure data exchange
Programming & Configuration
- Software: AMAT Equipment Control Suite
- Programming Languages: C++, AMAT Script
- Configuration Storage: Non-volatile memory
- Security: Role-based access control
Memory & Processing
- Processor: 32-bit RISC processor
- Program Memory: 4 MB Flash
- Data Memory: 2 MB RAM
- Execution Speed: 800 instructions per millisecond
Safety & Certification
- Safety Certification: CE, UL
- EMC Compliance: IEC 61000-6-2, IEC 61000-6-4
- Cleanroom Standard: ISO 14644-1 Class 100
- Quality Standard: ISO 9001, ISO 14001
Expansion Options
- I/O Expansion: Up to 2 expansion modules
- Communication Cards: Optional fieldbus interface
- Redundancy Modules: Hot standby configuration
- HMI Interface: Optional local operator interface
Response Time
- Analog Input: 3 ms typical
- Discrete Input: 1 ms typical
- Relay Output: 8 ms typical
- Control Loop Update: 10 ms minimum
Additional Information
Maintenance & Support
The AMAT 0010-13626 module is designed for minimal maintenance requirements in semiconductor manufacturing environments. Regular maintenance includes periodic inspection of connections, cleaning of ventilation openings, and verification of calibration. The module comes with a 1-year manufacturer's warranty, and extended warranty options are available.
Applied Materials provides comprehensive technical support through a global network of service centers and authorized distributors. Factory training programs are available for maintenance personnel, and 24/7 technical support is offered for critical manufacturing applications. Software updates and firmware upgrades are available to enhance functionality and maintain compatibility with evolving semiconductor manufacturing standards.
Applied Materials, Inc.
Semiconductor Equipment Solutions
Document Number: 0010-13626-DOC
Last Updated: 2025